Notice of Change in Representative Director

Tokyo Electron Limited (TEL) hereby announced that, at its Board of Directors meeting held on June 23, 2026, it resolved to make the following change in the Representative Director effective June 23, 2026. 1. Reason for the Change 2. Name, Date of Birth, Title, Effective Date of Appointment, and Number of TEL’s Shares Held of the New Representative Director (Note) The number of TEL’s shares held i