Coherent Corp. · NYSE:COHR
Coherent — OPTOmism 2009
12 slides from Coherent's conference presentation, May 20, 2009
Slide 1: UV lasers in solar cell manufacturing: Enabling increased cell efficiency & yield
UV lasers in solar cell manufacturing: Enabling increased cell efficiency & yield Finlay Colville Director of Marketing – Solar Coherent, Inc. OPTOmism: 20th May, 2009 Superior Reliability & Performance COMPANY CONFIDENTIAL
Slide 2: Contents
Contents 1. Market dynamics 2. Application drivers 3. Why ultra-violet lasers? 4. Why short-pulse lasers? 5. Changing ‘standard’ process flow 6. High-efficiency cell concepts 7. Laser-assisted selective-emitters 8. Laser source types Superior Reliability & Performance COMPANY CONFIDENTIAL
Slide 3: 1. Market dynamics
1. Market dynamics Laser revenues to solar: 2000 to 2008 Lasers: 2008 by type 100 Thin-Film DPSS ns $M c-Si 75 Diode CW 50 25 0 Other DPSS ps 00 02 04 06 08 Fiber ns UV Lasers fall mainly into c-Si, DPSS (ns/ps), & ‘Other’ Source: F. Colville, Lasers & Photonics Marketplace Seminar, San Jose, 2009.
Slide 4: 2. Application drivers
2. Application drivers Production Status Today Short- Short-pulses Applications wavelengths preferred Widespread Partial R&D preferred Adapted from: F. Colville et al, ‘Existing and emerging laser applications c-Si Applications Edge Isolation X within PV manufacturing’, Photovoltaics International,
Slide 5: 3. Why ultra-violet lasers?
3. Why ultra-violet lasers? c European PVSEC, Milan, 2007. K. Neckermann et al., 22nd A. Grohe et al, at 22nd EUPVSEC, Milan, 2007. A. Schoonerderbeek et al, in Proc. of 69th Laser Materials Processing (a) absorption in Conference, 2007 silicon/dielectrics (b) changes in carrier lifetimes (c) effect
Slide 6: 4. Why short-pulse lasers?
4. Why short-pulse lasers? Peak Powers & Diffusion Length for Typical Industrial-Grade ns & ps High-Energy Lasers 10000 Laser Peak 10-ps laser 10 ps Laser Pulses Source: Coherent, Inc. Product Data, Power (kW) 50 ns Laser Pulses 1000 Thermal Ld (Si) = 0.055 m diffusion depth 2008 100 (length) in Ld
Slide 7: 5. Changing 'standard' process flow
5. Changing ‘standard’ process flow Serves to illustrate next-gen lines likely to be retain many existing steps. Source: F. Colville, ‘Laser scribing exposed: the role of laser-based tools within the solar industry’, Photovoltaics International, 3, 2009. Superior Reliability & Performance COMPANY CO
Slide 8: 6. High-efficiency cell concepts
6. High-efficiency cell concepts Dielectric ablation Buried contacts Thru’ silicon via’s Image : F. Colville, EuroAsiaSolar, May 2009. Image : F. Colville, InterPV, June 2009. Image : F. Colville, InterPV, April 2009. Electroless plating LGBC & variants MWT & MWA Diffusion masking ‘Se/C-finger’ EWT
Slide 9: 7. Laser-assisted selective-emitters
7. Laser-assisted selective-emitters Source: F. Colville, ‘Laser-assisted selective-emitters’, In print. Superior Reliability & Performance COMPANY CONFIDENTIAL
Slide 10: 8. Laser source types
8. Laser source types Laser Forecast TAM for solar 2012 by type DPSS ns Diode CW DPSS ps Fiber ns Other Source: F. Colville, Lasers & Photonics Marketplace Seminar, San Jose, 2009. Superior Reliability & Performance COMPANY CONFIDENTIAL
Slide 11: Summary
Summary • c-Si laser production-line adoption catching up with (historic) Thin-Film bias • Short-pulse lasers (short-ns & sub-ns) dominate c-Si lines today • UV lasers enable next-generation processes • High-efficiency cell concepts require short-pulse & short-wavelength lasers • Laser-assisted sele
Slide 12: Contact details
Contact details Finlay Colville Director of Marketing – Solar Coherent, Inc. [email protected] + 44 7802 238 775 www.Coherent.com/Solar Superior Reliability & Performance COMPANY CONFIDENTIAL