Applied Materials, Inc. · NASDAQ:AMAT
Applied Materials — Technical Presentation (February 2004)
11 slides from Applied Materials's technical presentation, February 2004
Slide 1: Applied Endura2: Setting the Standard for 300mm High-Volume Manufacturing
Applied Endura®2: Setting the Standard for 300mm High-Volume Manufacturing Applied Materials External Use Confidential — Restricted / Modifier
Slide 2: Applied Endura Making History
2 Applied Endura Making History ! With an installed base of over 3,000 systems, the Endura is the most successful platform (200mm and 300mm) in the industry ! Endura was first to integrate Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD), Atomic Layer Deposition (ALD) processes ! Mos
Slide 3: Applied Endura2: Extending PVD Leadership Beyond 65nm
3 Applied Endura2: Extending PVD Leadership Beyond 65nm 5 Units Shipped ! 100th Endura 300mm Shipment ! 3,000th Endura System Shipment Units Shipped (Thousands) 4 ! 10th Endura Anniversary ! Endura iCuB/S ALD/PVD System Introduction ! 2,000th Endura System Shipment ! Endura SL System 3 Introduction
Slide 4: Moving Forward — Applied Endura2
4 Moving Forward — Applied Endura2 90nm - 45nm Technology Node ! New simplified 300mm platform – 20 percent fewer parts and higher reliability – Modular architecture for easy access and serviceability – Greater electrical simplicity – Increased automation ! Process transparency – Minimum re-qualific
Slide 5: Key Advantages
5 Key Advantages ! Improves reliability – Design simplification – Reduced amount of components ! Increases system uptime – Design for serviceability/modular architecture – Optimized preventative maintenance recovery ! Improves system throughput and defect performance – Process sequence optimization
Slide 6: Key Hardware Features and Benefits
6 Key Hardware Features and Benefits ! PVD Pedestal Lifts improve handoff accuracy ! Motorized Wafer Lifts improve overhead for higher throughput ! Improved RF Shielding eliminates noise effects ! Optimized Software enhancement ! Improved serviceability Standard XP robot ! Defect reduction enhanceme
Slide 7: Simpler and More Robust Design
7 Simpler and More Robust Design Applied Endura2: Easy Access and Serviceability External Use
Slide 8: Designed for Serviceability
8 Designed for Serviceability ! What does good serviceability mean? – Reducing time and cost to perform service – Greater access equals faster service • Mean Time To Repair (MTTR) directly correlated to access components being serviced ! Serviceability Elements – Easy body access – Increased visibil
Slide 9: Applied Endura2 Applications
9 Applied Endura2 Applications Al: DRAM, Logic UBM/Bondpad Cu: Logic, Flash Cu Barrier/Seed Al Al Slab Cu Al Fill W Liner/Barrier Cu W W W W Silicides ! All metal deposition applications ! PVD, CVD, ALD deposition technologies ExternalUse External Use
Slide 10: Summary — The New Productivity Standard
10 Serviceability Summary — The New Productivity Standard Productivity Reliability Increased system +20% reliability ! Improves reliability Service efficiency +20% ! Service efficiency reduces Accessibility +50% system downtime and Parts to manage -20% increased uptime Cables and PCBs -50% ! Improve
Slide 11: External Use
11 External Use
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