Silvaco Group, Inc. · NASDAQ:SVCO
Silvaco — Technical Presentation (September 2022)
14 slides from Silvaco's technical presentation, September 2022
Slide 1: Parasitic Extraction Victory RCx Pro and Hipex FS
Parasitic Extraction Victory RCx Pro and Hipex FS Integrated Full Chip and Cell Level RCX Combine Rule Based and Field Solver Solutions
Slide 2: Contents
Contents • Introduction • Simulation Methodologies • Rule Based – Generating Parasitic Database • Field Solver – Field Solver Methods – Boundary Element or Finite Element ? • Combining Both Rule and Field Solver Methods • Summary Copyright ©2022 Silvaco, Inc. 2
Slide 3: Introduction
Introduction • Many Solution Methodologies Exist for RCX Extraction • No One Methodology is Suitable for all Circuit Blocks • Combine Solution Methods for each Cell or Block • Common Integrated Platform to Localize User Options • Consider Intended User Skill Set, CAD versus TCAD • Consider Size and
Slide 4: Solution Methodologies
Solution Methodologies • Rule Based - or - Field Solver Based Copyright ©2022 Silvaco, Inc. 4
Slide 5: Rule Based
Rule Based • Capacitance Extract Geometry from layout Polygons • Resistance Count Conductor Length in “Squares” • Coefficient Database Converts Polygons into C and R Copyright ©2022 Silvaco, Inc. 5
Slide 6: Generating Parasitic Database
Generating Parasitic Database • However, generating the large capacitance coefficient database for rule based extraction, also requires a specific field solver solution, one time per technology Copyright ©2022 Silvaco, Inc. 6
Slide 7: Field Solver Methods
Field Solver Methods • Field Solver’s have several methods to apply the physics to • the Physical Representation of the Structure • Field Solvers Extract Both Capacitance and Resistance • Finite Difference and Finite Element Methods are: – Optimal for Complex and Curved 3D Shapes • Boundary Element
Slide 8: Boundary Element or Finite Element ?
Boundary Element or Finite Element ? • For Uniform Layer Thickness and • For Complex 3D Shapes Manhattan Shapes – Finite Element Method – Boundary Element Method Copyright ©2022 Silvaco, Inc. 8
Slide 9: Combining Both Rule and Field Solver Methods
Combining Both Rule and Field Solver Methods • Technology information for field solved sections can be defined in several ways: – 1/ Using TCAD tools and syntax (Left) – 2/ Using a GUI in the Layout Tool (Below) – 3/ A file provided from the PDK • Choices for TCAD or CAD Engineers Copyright ©2022 Si
Slide 10: Combining Both Rule and Field Solver Methods
Combining Both Rule and Field Solver Methods • Technology information plus layout is converted into a true 3D model of the BEOL for Field Solve Copyright ©2022 Silvaco, Inc. 10
Slide 11: Combining Both Rule and Field Solver Methods
Combining Both Rule and Field Solver Methods • Domain decomposition allows much larger circuit sections to be field solved Copyright ©2022 Silvaco, Inc. 11
Slide 12: Combining Both Rule and Field Solver Methods
Combining Both Rule and Field Solver Methods • Simulating a larger overlap improves accuracy a little at the expense of simulation speed. Example of full 4 bit adder below, using boundary element method, simulation time 26 minutes, 41 seconds using 4 CPUs Copyright ©2022 Silvaco, Inc. 12
Slide 13: Combining Both Rule and Field Solver Methods
Combining Both Rule and Field Solver Methods • True Mix and Match Capability in One Tool User selects which section of the layout is solved using finite element or boundary element field solvers, with the remainder using traditional rule based extraction Copyright ©2022 Silvaco, Inc. 13
Slide 14: Summary
Summary • Rule Based Extraction Use for Most of the Full Chip • Field Solver Extraction Complex R and C Topology – Where Highest Accuracy is Required for Critical Cells • Mix and Match Techniques within One Design Typical Maximum Cell Size illustration for using Field Solve Techniques Copyright ©202
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